| 000 | 01866cam a22004454a 4500 | ||
|---|---|---|---|
| 001 | 14123478 | ||
| 003 | OSt | ||
| 005 | 20231006133430.0 | ||
| 008 | 050928s2006 njua b 001 0 eng | ||
| 010 | _a 2005028448 | ||
| 015 |
_aGBA627486 _2bnb |
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| 016 | 7 |
_a013414729 _2Uk |
|
| 020 |
_a0471784060 (cloth : alk. paper) _cRM597.09 |
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| 020 |
_a9780471784067 _cRM597.09 |
||
| 035 | _a(OCoLC)ocm61821738 | ||
| 040 |
_aDLC _cKKKUANTANNTANNTAN _dKKKUANTANNTAN _dBAKER _dC#P _dCOO _dDLC _bEnglish |
||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7871.85 _b.M379 2006 |
| 082 | 0 | 0 |
_a621.3815/2 _222 |
| 100 | 1 | _aMay, Gary S. | |
| 245 | 1 | 0 |
_aFundamentals of semiconductor manufacturing and process control / _cGary S. May, Costas J. Spanos. |
| 260 |
_a[Piscataway] : _bIEEE ; _aHoboken, N.J. : _bWiley-Interscience, _cc2006. |
||
| 264 |
_aHoboken, N.J. : _bWiley-Interscience, _c©2006 |
||
| 300 |
_axix, 463 pages: _billustrations; _c25 cm. |
||
| 336 |
_atext _brdacontent |
||
| 337 |
_aunmediated _brdamedia |
||
| 338 |
_avolume _brdacarrier |
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| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. |
|
| 650 | 0 |
_aProcess control _xStatistical methods. |
|
| 658 | _cSTE | ||
| 700 | 1 | _aSpanos, Costas J. | |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/ecip061/2005028448.html |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0660/2005028448-d.html |
| 856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/enhancements/fy0740/2005028448-b.html |
| 906 |
_a7 _bcbc _corignew _d1 _eecip _f20 _gy-gencatlg |
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| 942 |
_2lcc _n0 _cBK |
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| 999 |
_c4288 _d4288 |
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