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Fundamentals of semiconductor manufacturing and process control /

May, Gary S.

Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos. - [Piscataway] : Hoboken, N.J. : IEEE ; Wiley-Interscience, c2006. - xix, 463 pages: illustrations; 25 cm.

Includes bibliographical references and index.

ISBN: 0471784060 (cloth : alk. paper) RM597.09 9780471784067 RM597.09

LCCN: 2005028448

Nat. Bib. No.: GBA627486 bnb

Nat. Bib. Agency Control No.: 013414729 Uk

Subjects--Topical Terms:
Semiconductors--Design and construction.
Integrated circuits--Design and construction.
Process control--Statistical methods.

Index Terms--Curriculum Objective: --STE

LC Class. No.: TK7871.85 / .M379 2006

Dewey Class. No.: 621.3815/2

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